Comparison ledger
KLA .204 PSL Wafer, KLA Altair 8920 Darkfield, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | KLA Altair 8920 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[2] | 8 inch[5] |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Handler | — | x3 FOUP with 8" adaptor plates[4] |
| Voltage | — | 208 VAC[4] |
| Phase | — | 3 Phase[4] |
| Largest Load | — | 5.6[4] |
| Vintage | — | 2019[4] |
| OEM | — | KLA[5] |
| Model | — | Altair 8920[5] |
| Inspection type | — | Darkfield Inspection[5] |
| Power | — | 208 VAC, 3 phase[4] |
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