Comparison ledger
KLA .204 PSL Wafer, KLA HRP 340 Surface, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 8" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | KLA HRP 340 |
| Specifications | ||
| Configuration | NIST Traceable[1] | Bad Load port[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| OS | — | Windows XP[5] |
| Vertical Range | — | 0-131 um[5] |
| Style Force | — | 0.05-15 mg[5] |
| Stylus | — | 2.0 um / 60[5] |
| Wafer size | — | PSL Standard 8 inch Wafer (9400 A Standard)[5] |
| OEM | — | KLA[4] |
| Model | — | HRP 340 Surface[4] |
| Category | — | Metrology & Inspection[6] |
| Model designation | — | HRP340[7] |
| Description | — | Surface profilometer[4] |
| Status | — | Sold[7] |
| Vintage | — | 2007[7] |
| Condition | — | Excellent[7] |
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