Waferpedia

Comparison ledger

.204 PSL Wafer versus INS 3000 DUV Defect

KLA .204 PSL Wafer and KLA INS 3000 DUV Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
.204 PSL WaferKLA
INS 3000 DUV DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—Wafer transport check
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferKLA INS 3000
Specifications
ConfigurationNIST Traceable[1]Auto Focus check for each lens[2]
Wafer Size8 inch[1]—
TraceabilityNIST[1]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
Wafer size—Wafer transport check[2]
Stage—Slight left-to-right tilt observed; minor scratches present[2]
.204 PSL Wafer entryINS 3000 DUV Defect entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing