Comparison ledger
KLA .204 PSL Wafer, KLA OP 2600 DUV Film Thickness Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1997 Vintage |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | KLA OP 2600 |
| Specifications | ||
| Configuration | NIST Traceable[1] | UV block is missing[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Manufacturer | — | KLA / Therma-wave[5] |
| Model | — | OP 2600 DUV[5] |
| Equipment type | — | Film Thickness Measurement[5] |
| Vintage | — | 1997[5] |
| Missing component | — | UV block[5] |
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