Waferpedia

Comparison ledger

.204 PSL Wafer versus P 17 Surface

KLA .204 PSL Wafer and KLA P 17 Surface, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
.204 PSL WaferKLA
P 17 SurfaceKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferKLA P
Specifications
ConfigurationNIST Traceable[1]50/60 Hz[2]
Wafer Size8 inch[1]—
TraceabilityNIST[1]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
Phase—1 Phase[2]
.204 PSL Wafer entryP 17 Surface entry

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing