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.204 PSL WaferversusSFS 6100 Wafer Surface Analysis

KLA .204 PSL Wafer, KLA SFS 6100 Wafer Surface Analysis, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
.204 PSL WaferKLA
SFS 6100 Wafer Surface AnalysisKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferKLA SFS
Specifications
ConfigurationNIST Traceable[1]Single Phase[4]
Wafer Size8 inch[1]4" to 8"[5]
TraceabilityNIST[2]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
NIST TraceableYes[1]—
Voltage—208 V[3]
Frequency—60 Hz[3]
Sensitivity—~0.16 µm[5]
Phase—Single Phase[3]
Current—17 A[3]
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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]inventory listing
  5. [5]slideserve.comslideserve.com