Waferpedia

Comparison ledger

.204 PSL Wafer versus Solid State

KLA .204 PSL Wafer and KLA Solid State, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
.204 PSL WaferKLA
Solid StateKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferKLA Solid State
Specifications
ConfigurationNIST Traceable[1]Upgrade for KLA AIT II & XP Series Systems[2]
Wafer Size8 inch[1]—
TraceabilityNIST[1]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
.204 PSL Wafer entrySolid State entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing