Comparison ledger
KLA .204 PSL Wafer, Micro-Vu Vertex 312 UC Measuring, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Vertex 312 UC MeasuringMicro-Vu | |
|---|---|---|
| OEM | KLA | Micro-Vu |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Micro-Vu Vertex |
| Specifications | ||
| Configuration | NIST Traceable[1] | With[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Manufacturer | — | Micro-Vu[4] |
| Model | — | Vertex 312 UC Measuring[4] |
| Equipment type | — | measuring machine[5] |
| Included joystick | — | Yes[5] |
| Included power adapter | — | Yes[5] |
| Included USB cable | — | Yes[5] |
| Included table | — | Table with casters[5] |
| Included PC | — | Dell Optiplex 9020 AIO PC[5] |
| Included software | — | InSpec Metrology software version 2.97.10[5] |
| Included keyboard and mouse | — | Keyboard, mouse[5] |
| Included power cord | — | AC power cord[5] |
| Vintage | — | 2014[4] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →