Waferpedia

Comparison ledger

.204 PSL WaferversusSMZ-2B

KLA .204 PSL Wafer, Nikon SMZ-2B, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
SMZ-2BNikon
OEMKLANikon
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferNikon SMZ-2B
Specifications
ConfigurationNIST Traceable[1]Desk mount boom stand or base plate boom stand[5]
Wafer Size8 inch[2]—
TraceabilityNIST[3]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
NIST TraceableYes[2]—
Compatible toolsSurfscan 6xy0 and Sp1 particle counters[2]—
OEM—Nikon[4]
Model—SMZ-2B[4]
Section—Binocular Model[4]
Location—Z17[4]
Microscope Type—Stereo[5]
Observation Method—Reflected light[5]
Magnification Range—8 - 50X (typical factory)[5]
Height—9.38 in[5]
Width—12 in[5]
Depth—7.25 in[5]
Power Requirements—115V[5]
Observation mode—Reflected light observation[5]
Typical factory magnification—8-50X[5]
Light source compatibility—High intensity light source[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]epfl.chepfl.ch
  5. [5]labwrench.comlabwrench.com