Comparison ledger
KLA .204 PSL Wafer, Olympus scope1, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | scope1Olympus | |
|---|---|---|
| OEM | KLA | Olympus |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Olympus scope1 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Vendor | — | Olympus[4] |
| Model | — | MX61A[4] |
| Purpose | — | Semiconductor microscope for sample inspection and documentation[4] |
| Observation methods | — | Brightfield and darkfield[4] |
| Objectives | — | 5x, 20x, 50x, 100x, and 150x objectives on motorized turret[4] |
| Stage focus | — | Motorized stage focus[4] |
| Digital imaging | — | Steam Motion software for calibrated measurements[4] |
| OEM | — | Olympus[4] |
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