Waferpedia

Comparison ledger

.204 PSL WaferversusTXRF-3760

KLA .204 PSL Wafer, Rigaku TXRF-3760, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
TXRF-3760Rigaku
OEMKLARigaku
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferRigaku TXRF-3760
Specifications
ConfigurationNIST Traceable[1]—
Wafer Size8 inch[1]—
TraceabilityNIST[2]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
NIST TraceableYes[1]—
Tool designation—Rigaku-TXRF-3760[3]
Category—Metrology[3]
OEM—Rigaku[3]
Model—TXRF-3760[3]
Inventory designation—Rigaku-TXRF-3760[3]
Equipment category—Metrology[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]nanousers.mit.edunanousers.mit.edu