Comparison ledger
KLA .204 PSL Wafer, Thermo Fisher Scientific FEI Helios NanoLab 600 I FIB-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Scientific FEI Helios NanoLab 600 I FIB-SEMThermo Fisher | |
|---|---|---|
| OEM | KLA | Thermo Fisher |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Thermo Fisher Scientific FEI Helios NanoLab 600 I FIB-SEM |
| Specifications | ||
| Configuration | NIST Traceable[1] | System covers for Helios NanoLab[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| System covers for Helios NanoLab | — | Present[4] |
| ICE Detector | — | Present[4] |
| Integrated Plasma Cleaner | — | Present[4] |
| Edwards XDS 35 i Pump Kit | — | Present[4] |
| Workstation with Windows XP | — | Present[4] |
| xT software version 5-x | — | Present[4] |
| Support PC with Windows XP | — | Present[4] |
| 2x 24" widescreen LCD monitor | — | Present[4] |
| Joystick | — | Present[4] |
| Manual User Interface | — | Present[4] |
| Elstar electron column | — | Present[4] |
| Tomahawk ion column with fast ion beam blanker | — | Present[4] |
| 150 x 150 mm eucentric stage | — | Present[4] |
| In-lens detector TLD with SE and BSED modes | — | Present[4] |
| Secondary electron detector (SED) | — | Present[4] |
| Beam current measurement | — | Present[4] |
| CCD IR camera | — | Present[4] |
| Oil-free pumping system | — | Present[4] |
| Large table top with support | — | Present[4] |
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