Comparison ledger
KLA .204 PSL Wafer, Thermo Fisher Scientific FEI Nova NanoSEM 600, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Scientific FEI Nova NanoSEM 600Thermo Fisher | |
|---|---|---|
| OEM | KLA | Thermo Fisher |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Thermo Fisher Scientific FEI Nova NanoSEM |
| Specifications | ||
| Configuration | NIST Traceable[1] | High Resolution[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Instrument type | — | Scanning electron microscope[5] |
| Imaging | — | High-resolution[4] |
| Electron source | — | Schottky FEG[5] |
| Vacuum modes | — | Works in high and low vacuum[5] |
| STEM mode resolution | — | As low as 1 nanometer[4] |
| Mode | — | STEM mode[4] |
| Stage | — | 150 mm stage[5] |
| Chamber | — | Large chamber[5] |
| Analytical capability | — | Easy to add analytical capability[4] |
| STEM mode | — | Includes STEM mode[5] |
| Low-kV mode | — | Includes decel mode for low KV performance[4] |
| Resolution | — | In STEM mode, the resolution can be as low as 1 nanometer[4] |
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