Comparison ledger
KLA .204 PSL Wafer, Thermo Fisher Scientific FEI Quanta 3 D FEG 600 FIB-SEM-EDS, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Scientific FEI Quanta 3 D FEG 600 FIB-SEM-EDSThermo Fisher | |
|---|---|---|
| OEM | KLA | Thermo Fisher |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Thermo Fisher Scientific FEI Quanta |
| Specifications | ||
| Configuration | NIST Traceable[1] | Dual Beam[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Voltage | — | 230 V[4] |
| Instrument type | — | dual-beam FIB-SEM-EDS system[4] |
| Instrument description | — | focused ion beam, scanning electron microscope, and energy dispersive X-ray spectroscopy instrument[4] |
| Power | — | 50/60 Hz[4] |
| Current | — | 8 A[4] |
| Vintage | — | 2011[5] |
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