Waferpedia

Comparison ledger

.204 PSL WaferversusScientific FEI Quanta 450

KLA .204 PSL Wafer, Thermo Fisher Scientific FEI Quanta 450, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMKLAThermo Fisher
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferThermo Fisher Scientific FEI Quanta
Specifications
ConfigurationNIST Traceable[1]50/60 Hz[4]
Wafer Size8 inch[2]—
TraceabilityNIST[3]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
NIST TraceableYes[2]—
Compatible toolsSurfscan 6xy0 and Sp1 particle counters[2]—
Voltage—230V[5]
Full load—8A[4]
OEM—Thermo Fisher Scientific / FEI[5]
Model—Quanta 450[5]
Instrument type—Scanning Electron Microscope (SEM)[5]
Power—50/60 Hz, 230V[4]
Full load current—8A[4]
Included components—Edwards RV 8, Edwards PV 25 MK, FEI SE R 580 Detector[4]
Vintage—2013[5]
Category—Metrology & Inspection[5]
Included component—FEI SE R 580 Detector[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]inventory listing
  5. [5]waferpedia.comwaferpedia.com