Comparison ledger
KLA .204 PSL Wafer, Thermo Fisher Scientific FEI Tecnai T 12 TEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Scientific FEI Tecnai T 12 TEMThermo Fisher | |
|---|---|---|
| OEM | KLA | Thermo Fisher |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Thermo Fisher Scientific FEI Tecnai T 12 TEM |
| Specifications | ||
| Configuration | NIST Traceable[1] | Ion pump replaced 2020[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Instrument type | — | Transmission Electron Microscope[4] |
| Category | — | Metrology & Inspection[5] |
| Ion pump | — | replaced 2020[4] |
| PC, ODP heater, and hand panels | — | replaced 2024[4] |
| Wehnelt | — | current LaB6 source functional[4] |
| Detector | — | MultiScan CCD[4] |
| EDS system | — | Oxford Inca EDS system, left off of the instrument since 2021 due to a pressure issue[4] |
| Vintage | — | 2003[4] |
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