Comparison ledger
KLA .204 PSL Wafer, Veeco NT 9800 Optical, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NT 9800 OpticalVeeco | |
|---|---|---|
| OEM | KLA | Veeco |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Veeco NT 9800 |
| Specifications | ||
| Configuration | NIST Traceable[1] | Single Phase[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Instrument type | — | Optical Interferometric Profiler[5] |
| Product line | — | Metrology & Instrumentation[5] |
| Electrical phase | — | Single Phase[4] |
| Frequency | — | 50/60 Hz[4] |
| Voltage | — | 115/230 V[4] |
| Power rating | — | 375 VA[4] |
| Stated vintage | — | 2010[4] |
| Equipment type | — | Optical profilometer[4] |
| Alternate model name | — | Wyko NT9800 Optical Profiler[5] |
| Model | — | NT 9800[4] |
| Make | — | Veeco / Wyko[4] |
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