Comparison ledger
KLA .204 PSL Wafer, YXLON UX20, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | UX20YXLON | |
|---|---|---|
| OEM | KLA | YXLON |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | YXLON UX20 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Manufacturer | — | YXLON[4] |
| Model | — | UX20[4] |
| Product family | — | X-ray and CT Inspection Systems[4] |
| System type | — | X-ray and CT inspection system[5] |
| Intended parts | — | Medium to large cast parts[6] |
| User interface | — | Geminy[5] |
| Inspection modes | — | 2D, 3D, 2D/3D[5] |
| Maximum sample weight | — | 100 kg[5] |
| System dimensions (W/D/H) | — | 2250 x 1770 x 2350 mm[5] |
| Available X-ray tubes | — | 160-225 kV mini-focus; 225 kV MesoFocus[5] |
| Detector active area | — | 1280 x 1280 px; 3072 x 3072 px[5] |
| Pixel pitch | — | 179 µm; 139 µm[5] |
| Inspection envelope DR (2D) | — | 710 x 1090 mm; 800 x 1100 mm[5] |
| Inspection envelope CT (3D) | — | 190 x 165 mm; 340 x 280 mm[5] |
| Inspection envelope CT (3D) with ScanExtend | — | 315 x 1085 mm; 540 x 1100 mm[5] |
| Maximum part weight | — | 100 kg[6] |
| Cabinet width | — | 2550 mm[6] |
| Cabinet depth | — | 1770 mm[6] |
| Cabinet height | — | 2350 mm[6] |
| Maximum power consumption | — | 3.8 kVA[6] |
| Maximum dose rate | — | 1 μSv/h[6] |
| Manipulation | — | 5 axes[5] |
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