Comparison ledger
KLA .204 PSL Wafer, Zeiss Supra 40 VP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Supra 40 VPZeiss | |
|---|---|---|
| OEM | KLA | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Zeiss Supra 40 VP |
| Specifications | ||
| Configuration | NIST Traceable[1] | Coolstage (never used)[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Lowest Coolstage Temp | — | -50 C Deg[4] |
| Type | — | Scanning electron microscope (SEM)[4] |
| Model | — | Supra 40 VP[4] |
| Category | — | Metrology & Inspection[5] |
| Accessory / subsystem mentioned | — | Thermofisher EDS[5] |
| Configuration / option mentioned | — | Coolstage (never used)[5] |
| Lowest Coolstage temperature | — | -50 C Deg[5] |
| Issue noted | — | Issue with the transmitted detector[5] |
| Device class | — | Electron microscope[6] |
| Manufacturer | — | ZEISS[6] |
| Application | — | High resolution microscopy; structure and element analysis of ready-prepared surfaces and cross-sections; characterisation of crystal structure[6] |
| Source / emitter | — | Gemini® tube with Schottky emitter[6] |
| Variable pressure option | — | Available for investigating non-conducting specimen without previous metallisation[6] |
| Maximum resolution | — | 1.3 nm @ 15 kV; 2.1 nm @ 1 kV; 5.0 nm @ 0.2 kV[6] |
| Magnification | — | 12…900,000x[6] |
| Acceleration voltage | — | 0.1…30 kV[6] |
| Measurement current | — | 4 pA…20 nA[6] |
| Detectors | — | In-Lens detector; Everhart-Thornley-SE detector; VPSE detector[6] |
| Software | — | SmartSEM[7] |
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