Comparison ledger
KLA 2132 Brightfield and KLA FLX 2320, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | FLX 2320KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 21xx | KLA FLX 2320 |
| Specifications | ||
| Configuration | Main body only[1] | Refurbished[2] |
| Dual Wavelength Scanning | — | 670 nm, 785 nm[2] |
| Software Version | — | 4.4[2] |
| Operation Manual | — | Digital Copy[2] |
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