Comparison ledger
KLA 2132, KLA eDR 5210 DR-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 2132KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 2132 | KLA eDR |
| Specifications | ||
| Product type | Wafer inspection system[1] | — |
| Relationship to KLA 2135 | Earlier model than the KLA 2135[1] | — |
| Wafer size (primary) | 200mm (8")[2] | — |
| Wafer size (alternate) | 4", 5", 6" capable[2] | — |
| Throughput | 2–8 wafers per hour[2] | — |
| Sensitivity | >0.25 µm pixels[2] | — |
| Inspection type | Patterned wafer defect inspection[2] | — |
| Optics | Brightfield, small-pixel, high data rate digital image processing[1] | — |
| User interface | DOS operating system[3] | — |
| SAT capability | Segmented Auto Threshold (SAT) included[2] | — |
| Calibration wafer | 8" DSW calibration wafer included[2] | — |
| Vintage (year of introduction) | 1995[2] | — |
| Vintage | 1995[2] | 2010[5] |
| Primary wafer size | 200 mm (8 in)[2] | — |
| Capable wafer sizes | 100 mm (4 in), 125 mm (5 in), 150 mm (6 in)[2] | — |
| Segmented Auto Threshold (SAT) | Included[2] | — |
| Optics / imaging | Brightfield, small-pixel, high-data-rate digital image processing[1] | — |
| Configuration | Inspection station; open cassette x2[3] | 2 Load Port (Brooks FixLoad)[4] |
| SAT option | Included in some configurations; excluded in one listed configuration[3] | — |
| Wafer size | — | 12 inch (300 mm)[5] |
| Robot & Aligner | — | Brooks[4] |
| TMP | — | Edward[4] |
| Ion pump | — | Varian[4] |
| Tool type | — | Defect review scanning electron microscope[4] |
| Category | — | Metrology & Inspection[5] |
| Wafer handling | — | Robot & Aligner (Brooks)[4] |
| Vacuum & pumping | — | TMP (Edward); Ion pump (Varian)[4] |
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