Comparison ledger
KLA 2133 Brightfield and KLA 2138 Brightfield, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | Wafer Transfer | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 21xx | KLA 21xx |
| Specifications | ||
| Configuration | 2 x 25 Auto Load[1] | 30 A[2] |
| Wafer size | Wafer Transfer[1] | — |
| Process Vac | 23 InHg[1] | — |
| Inlet Power | 3 line of 208 Vac 20 Amp[1] | — |
| CDA | 100 PSI[1] | — |
| Exhaust for Cooling | Blower[1] | — |
| Voltage | — | 208 V, 3 Phase[2] |
| Software Version | — | 5.4.010[2] |
| Robot Type | — | KLA Internal[2] |
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