Waferpedia

KLA

2133 Brightfield

2133 Brightfield — Inventory photo
Fig. 012133 BrightfieldInventory photo[1]

Wafer size

Wafer Transfer

Power

3 line of 208 Vac 20 Amp[1]

Vacuum

100 PSI[1]

What is it?

The KLA 2133 Brightfield is a wafer inspection tool for 6-inch wafers.

What do the numbers mean?

Power & electrical1

Inlet Power
3 line of 208 Vac 20 Amp[1]
Accurate?

Vacuum & pumping2

CDA
100 PSI[1]
Accurate?
Exhaust for Cooling
Blower[1]
Accurate?

Wafer handling3

Cassette Transfer[1]
Accurate?
Wafer size
Wafer Transfer[1]
Accurate?
Boat Elevator / Robot Transfer[1]
Accurate?

Configuration & options3

2 x 25 Auto Load[1]
Accurate?
Scan Stage[1]
Accurate?
Process Vac
23 InHg[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Inlet Power3 line of 208 Vac 20 Amp[1]
  • CDA100 PSI[1]
  • Exhaust for CoolingBlower[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the 2133 Brightfield are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2133 Brightfield are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 2133 Brightfield are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 2133 Brightfield are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 2133 Brightfield are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 2133 Brightfield is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Equipment inventory listing
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Last updated Jul 29, 2026.

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