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Comparison ledger

2133 Brightfield versus Surfscan 6420 Unpatterned Surface

KLA 2133 Brightfield and KLA Surfscan 6420 Unpatterned Surface, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
2133 BrightfieldKLA
Surfscan 6420 Unpatterned SurfaceKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer sizeWafer Transfer—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 21xxKLA Surfscan 6420
Specifications
Configuration2 x 25 Auto Load[1]16A[2]
Wafer sizeWafer Transfer[1]—
Process Vac23 InHg[1]—
Inlet Power3 line of 208 Vac 20 Amp[1]—
CDA100 PSI[1]—
Exhaust for CoolingBlower[1]—
Phase—1 phase[2]
Frequency—60 Hz[2]
Voltage—208V[2]
2133 Brightfield entrySurfscan 6420 Unpatterned Surface entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing