Comparison ledger
KLA 2138 Brightfield and KLA Archer 10 XT Overlay, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 21xx | KLA Archer |
| Specifications | ||
| Configuration | 30 A[1] | During refurbishment the loadports were replaced with the cassette loader that is shown in our video below[2] |
| Voltage | 208 V, 3 Phase[1] | — |
| Software Version | 5.4.010[1] | — |
| Robot Type | KLA Internal[1] | — |
| Wafer size | — | 200mm dual port open wafer handler[2] |
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