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KLA

Archer 10 XT Overlay

Metrology & Inspection200mmKLA Archer family
Research Quality: 30% complete
Archer 10 XT Overlay — Inventory photo
Fig. 01Archer 10 XT OverlayInventory photo[1]

What is it?

The KLA Archer 10 XT Overlay System is a 200mm overlay metrology system with refurbishment-upgraded components and software version 5.6.

What do the numbers mean?

Wafer handling3

During refurbishment the loadports were replaced with the cassette loader that is shown in our video below[1]
Accurate?
Wafer size
200mm dual port open wafer handler[1]
Accurate?
8” chuck[1]
Accurate?

Control & software3

XP computer upgrade[1]
Accurate?
Software 5.6[1]
Accurate?
KLASS – RS2 computer[1]
Accurate?

Configuration & options5

AMS[1]
Accurate?
Digitizer[1]
Accurate?
LINNIK[1]
Accurate?
PDA[1]
Accurate?
PZT -P- Z feedback[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Archer 10 XT Overlay are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Archer 10 XT Overlay are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Archer 10 XT Overlay are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Archer 10 XT Overlay are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Archer 10 XT Overlay are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Archer 10 XT Overlay is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Archer AIM Advanced Optical Overlay Metrology Equipment - Certified Used Metrology Equipment | KLA-Tencorkla-tencor.com (Dec 28, 2016)web.archive.org
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Last updated Jul 29, 2026.

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