Comparison ledger
KLA 2138 Brightfield and KLA P-7, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | P-7KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 21xx | KLA P-7 |
| Specifications | ||
| Configuration | 30 A[1] | — |
| Voltage | 208 V, 3 Phase[1] | — |
| Software Version | 5.4.010[1] | — |
| Robot Type | KLA Internal[1] | — |
| equipment type | — | Stylus profilometer[2] |
| equipment type category | — | Topographical Metrology[3] |
| equipment name as listed | — | Step Profilometer (KLA Tencor P-7)[3] |
| Step Height Range | — | Nanometers to 1000 µm[4] |
| Stylus Tip Radius | — | 2 µm[5] |
| Stylus Bevel | — | 60°[5] |
| Max Scan Length | — | 150 mm[6] |
| Vertical Range | — | 1 mm[6] |
| Sample Size | — | Up to 150 mm[6] |
| Sampling Rate | — | Higher sampling rates increase data resolution, but can introduce noise above 200 Hz[5] |
| Applied Force | — | 0.03 to 50 mg[4] |
| Stylus Material | — | Diamond[4] |
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