KLA
The KLA P-7 is a stylus profilometer used for surface metrology and measurement.[5][1]
The KLA P-7 uses a stylus with a 2 micrometer tip radius and a 60 degree bevel. The P-7 supports step-height measurement from a few nanometers to one millimeter, and it supports scans up to 150 millimeters without stitching.[4][5]
The KLA P-7 supports two-dimensional and three-dimensional measurements, and its measurement set includes step heights, roughness, bow, and stress. The system also uses software for measurement parameters and data processing.[5]
The KLA P-7 is used for thin-film step heights, surface roughness, and etched trench depth.[4][5]
The KLA P-7 is used in semiconductors, MEMS, data storage, opto-electronics, and solar technology. The instrument also supports measurements of depth, waviness, flatness, distance, bearing ratio, and radius of curvature.[5]
Documented failure modes, common issues, and field considerations.
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The KLA P-7 uses a stylus with a 2 micrometer tip radius and a 60 degree bevel.[4][5]
The KLA P-7 supports step height, roughness, bow, stress, depth, waviness, flatness, distance, bearing ratio, and radius of curvature measurements.[5]
The following facts about the P-7 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the P-7 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the P-7 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the P-7 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the P-7 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the P-7 are on record.
Answerable by: an OEM parts catalog or a service engineer
Last updated Sep 2, 2026.
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