Comparison ledger
KLA 2138 and KLA INS 3000 DUV Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 2138KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | Wafer transport check |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 2138 | KLA INS 3000 |
| Specifications | ||
| Product name | KLA-2138[1] | — |
| Type | Wafer Inspection System[1] | — |
| Technology | Ultra-Broadband Technology[1] | — |
| Illumination source | Ultra-broadband (UBB) illumination source[1] | — |
| Optics | Significantly improved brightfield optics[1] | — |
| Detection technology | Segmented Auto Threshold (SAT) technology[1] | — |
| Optional configuration | Integrated SMIF minienvironment[1] | — |
| Wafer size | — | Wafer transport check[2] |
| Configuration | — | Auto Focus check for each lens[2] |
| Stage | — | Slight left-to-right tilt observed; minor scratches present[2] |
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