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KLA

2138

Metrology & InspectionKLA 2138 family
Research Quality: 40% complete
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2138 — web.archive.org
Fig. 012138web.archive.org[1]

What is it?

The sources identify the KLA-2138 as a wafer inspection system in KLA-Tencor's product set. It is described as a system for inline inspection that detects yield-relevant defect types on process layers, using ultra-broadband illumination, improved brightfield optics, and Segmented Auto Threshold technology.

What can it run?

Process applications and technology nodes documented for this tool.

  • Inline inspection of process layers
  • Detection of yield-limiting defects
  • Defect inspection on wafers

What do the numbers mean?

Wafer handling1

Type
Wafer Inspection System[1]
Accurate?

Optics & imaging2

Illumination source
Ultra-broadband (UBB) illumination source[1]
Accurate?
Optics
Significantly improved brightfield optics[1]
Accurate?

Configuration & options4

Product name
KLA-2138[1]
Accurate?
Technology
Ultra-Broadband Technology[1]
Accurate?
Detection technology
Segmented Auto Threshold (SAT) technology[1]
Accurate?
Optional configuration
Integrated SMIF minienvironment[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 2138 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2138 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 2138 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 2138 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 2138 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 2138 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
  2. [2]KLA-Tencor Web Site --- The IC Manufacturing Process 7 — web.archive.orgweb.archive.org
  3. [3]KLA-Tencor Web Site --- The IC Manufacturing Process 3 — web.archive.orgweb.archive.org
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Last updated Jul 29, 2026.

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