Comparison ledger
KLA 2138 XP and KLA AIT II Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 2138 XPKLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 2138 XP | KLA AIT |
| Specifications | ||
| Software Version | — | 5.3.20.4[1] |
| CIM | — | SECS, GEM[1] |
| Handler System | — | Dual[1] |
| Factory Interface | — | Open Cassette[1] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →