Comparison ledger
KLA 2138 XP and KLA AIT XUV Darkfield, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 2138 XPKLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 2138 XP | KLA AIT XUV |
| Specifications | ||
| Software Version | — | 6.3.24.3[1] |
| CIM | — | SECS / GEM[1] |
| Factory System | — | FOUPS[1] |
| Handler System | — | Robot[1] |
| Configuration | — | Pillar[1] |
| Missing Parts | — | Incomplete Wafer Handler Module & Inspection Module[1] |
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