Waferpedia

Comparison ledger

2138 XP versus MicroSense UMSC 200 BT Measurement

KLA 2138 XP and KLA MicroSense UMSC 200 BT Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyKLA 2138 XPKLA MicroSense
Specifications
Configuration10 A[1]
Voltage120 V[1]
Main Air Pressure50 PSI[1]
Stage Air Pressure5 Psi[1]
Measurement TypeFlatness & Thickness[1]
System TypeNon-contact Measurement[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing