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Comparison ledger

2138 XP versus Surfscan 6420 Unpatterned Surface

KLA 2138 XP and KLA Surfscan 6420 Unpatterned Surface, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
2138 XPKLA
Surfscan 6420 Unpatterned SurfaceKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 2138 XPKLA Surfscan 6420
Specifications
Phase—1 phase[1]
Frequency—60 Hz[1]
Voltage—208V[1]
Configuration—16A[1]
2138 XP entrySurfscan 6420 Unpatterned Surface entry

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing