Comparison ledger
KLA 2139 UI Brightfield Patterned Surface Defect and KLA P-20H, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | P-20HKLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | Legacy |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 2139 | KLA P-20H |
| Specifications | ||
| Configuration | Ultra-Broadband Illumination[1] | — |
| Tool type | — | Stylus profilometer[2] |
| Stylus tip radius | — | 2 µm[2] |
| Stylus cone angle | — | 60°[2] |
| Vertical range | — | 325 µm[2] |
| Sensor element | — | Capacitive sensor element[2] |
| Motion stage | — | Precision motion stage[2] |
| Vertical resolution | — | Roughly nm scale[2] |
| Stage movement | — | 8 inch[2] |
| Serial number | — | 09940111[2] |
| Tool owner | — | Joseph Jacob[2] |
| Access mode | — | Walk-up tool (no reservation needed)[2] |
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