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2213-75 TSLKTB Argon versus P 16 +

KLA 2213-75 TSLKTB Argon and KLA P 16 +, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
2213-75 TSLKTB ArgonKLA
P 16 +KLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 2213-75 TSLKTB ArgonKLA P 16 +
Specifications
ConfigurationCompatible for KLA AIT II & XP Series Systems[1]2A, 20in Hg @ 1cfm[2]
Phase—1 Phase[2]
Software—(OS) version 7.31.05 [Build 5][2]
2213-75 TSLKTB Argon entryP 16 + entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing