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KLA

P 16 +

Metrology & InspectionKLA P 16 + family
Research Quality: 40% complete
P 16 + — Inventory photo
Fig. 01P 16 +Inventory photo[1]

What it is

The KLA P 16 + is a profilometer.[1]

What do the numbers mean?

Wafer handling1

Manual Handler[1]
Accurate?

Control & software1

Software
(OS) version 7.31.05 [Build 5][1]
Accurate?

Configuration & options5

Phase
1 Phase[1]
Accurate?
2A, 20in Hg @ 1cfm[1]
Accurate?
Stand alone[1]
Accurate?
STD Manuals included[1]
Accurate?
GEM / SECS[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the P 16 + are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the P 16 + are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the P 16 + are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the P 16 + are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the P 16 + are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the P 16 + is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]KLA Tencor | MEMSkla-tencor.com (Sep 9, 2009)web.archive.org
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Last updated Jul 29, 2026.

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