KLA

P 16 +

Metrology & Inspection KLA P 16 + family

Research Quality: 50% complete

The KLA P 16 + is a stylus profilometer. The KLA P 16 + is used for surface metrology and inspection. The KLA P 16 + supports wafer sizes from 2 inch to 12 inch.^[1]^[2]

P 16 + — Inventory photo — Fig. 01P 16 +Inventory photo^[2]

What it is

General reference — not yet source-verified

A stylus profilometer is a surface metrology tool used to trace surface height changes across a sample. Stylus profilometers are used in semiconductor and microsystems work to measure topography features such as steps, trenches, films, and surface texture.

How it works

The KLA P 16 + Profiler has a fully motorized X-Y, Z, theta, and level stage. The KLA P 16 + Profiler has a vertical range of 327 µm.^[1]

Where it fits in the process flow

General reference — not yet source-verified

Profilometers are typically used after a process step has created or modified surface relief, film thickness, or surface texture. Profilometers commonly sit in metrology loops around deposition, etch, planarization, and packaging-related operations, where the measured profile helps verify process results before the next manufacturing step.

Applications

The KLA P 16 + Profiler is used for CMP monitoring and bump metrology. The KLA P 16 + Profiler is used for thin film thickness, roughness, and stress analysis. The KLA P 16 + Profiler is used for etch rate and trench depth analysis.^[1]

What do the numbers mean?

Wafer handling3

Manual Handler^[2]
Wafer sizes: 2, 3, 4, 5, 6, 8, 12 inch^[1]
Wafer sizes: 6, 8 inch^[2]

Performance1

Applications: Etch rate and trench depth analysis^[1]

Control & software3

Software: (OS) version 7.31.05 [Build 5]^[2]
Software: Profiler V 7.35^[1]
Operating system: Windows XP^[1]

Dimensions & facilities1

Measurement type: Step height, roughness, waviness, stress^[1]

Configuration & options11

Phase: 1 Phase^[2]; 2A, 20in Hg @ 1cfm^[2]; Stand alone^[2]; STD Manuals included^[2]; GEM / SECS^[2]
Tool type: Stylus profilometer^[1]
Vertical range: 327 µm^[1]
Stage: Fully motorized X-Y, Z, theta, and level stage^[1]
Stylus: 2 µm / 60D^[1]
Applications: CMP monitoring and bump metrology^[1]
Applications: Thin film thickness, roughness, and stress analysis^[1]

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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What vertical range is given for the KLA P 16 + stylus profiler?

The KLA P 16 + Profiler has a vertical range of 327 µm.^[1]

Not publicly documented

The following facts about the P 16 + are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the P 16 + are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the P 16 + are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the P 16 + are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the P 16 + are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the P 16 + is not on record.
Answerable by: an OEM datasheet or a fab qualification report