Waferpedia

Comparison ledger

2350 versus 2367

KLA 2350 and KLA 2367, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
2350KLA
2367KLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer sizeOnly one wafer size at a time
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyKLA 23xxKLA 2367
Specifications
ConfigurationRefurbished[1]Shinko LP[2]
SW Version10.4.507[2]
Wafer sizeOnly one wafer size at a time[2]
300 mm (12")Yaskawa + Asyst ISO Port or[2]
200 mm (8")Yaskawa + Asyst Versa Port (SMIF)[2]
GLG Line[2]
ILI Line[2]
VISVisible[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing