Waferpedia

KLA

2367

Metrology & InspectionOnly one wafer size at a timeKLA 2367 family
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2367 — Inventory photo
Fig. 012367Inventory photo[1]

What is it?

The KLA 2367 is a metrology and inspection tool configured for 8-inch or 12-inch wafers, with only one wafer size at a time.

What do the numbers mean?

Wafer handling1

Wafer size
Only one wafer size at a time[1]
Accurate?

Configuration & options13

SW Version
10.4.507[1]
Accurate?
300 mm (12")
Yaskawa + Asyst ISO Port or[1]
Accurate?
Shinko LP[1]
Accurate?
200 mm (8")
Yaskawa + Asyst Versa Port (SMIF)[1]
Accurate?
GL
G Line[1]
Accurate?
IL
I Line[1]
Accurate?
0.12 UV/GL/IL[1]
Accurate?
0.16 UV/GL/IL[1]
Accurate?
0.20 UV/GL/IL[1]
Accurate?
VIS
Visible[1]
Accurate?
0.25 VIS[1]
Accurate?
0.39 VIS[1]
Accurate?
0.62 VIS[1]
Accurate?
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Parts & consumables

Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.

  • KLA 2367 Y MotorIn Productionsource[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the 2367 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2367 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 2367 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 2367 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 2367 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 2367 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]Certified Used Equipment | 2367 | KLA-Tencor — kla-tencor.com (Apr 9, 2016)web.archive.org
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Last updated Jul 29, 2026.

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