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Comparison ledger

2350 versus Surfscan AIT 8010 Particle Defect

KLA 2350 and KLA Surfscan AIT 8010 Particle Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
2350KLA
Surfscan AIT 8010 Particle DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 23xxKLA Surfscan
Specifications
ConfigurationRefurbished[1]Hz 50-60[2]
Software version—3.3.2.813[2]
CIM—SECS, GEM[2]
Volts—200-240[2]
Amps—30[2]
Phase—1[2]
2350 entrySurfscan AIT 8010 Particle Defect entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing