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KLA

Surfscan AIT 8010 Particle Defect

Metrology & InspectionKLA Surfscan family
Research Quality: 30% complete
Surfscan AIT 8010 Particle Defect — Inventory photo
Fig. 01Surfscan AIT 8010 Particle DefectInventory photo[1]

What is it?

The KLA Surfscan AIT 8010 Particle Defect System is a particle defect inspection system with software version 3.3.2.813 and SECS/GEM CIM.

What do the numbers mean?

Power & electrical3

Volts
200-240[1]
Accurate?
Amps
30[1]
Accurate?
Hz 50-60[1]
Accurate?

Control & software1

Software version
3.3.2.813[1]
Accurate?

Configuration & options3

CIM
SECS, GEM[1]
Accurate?
Phase
1[1]
Accurate?
Full Load Cap. 2A[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Volts200-240[1]
  • Amps30[1]
  • ConfigurationHz 50-60[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Surfscan AIT 8010 Particle Defect are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan AIT 8010 Particle Defect are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Surfscan AIT 8010 Particle Defect are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Surfscan AIT 8010 Particle Defect are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Surfscan AIT 8010 Particle Defect are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Surfscan AIT 8010 Particle Defect is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Jul 29, 2026.

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