KLA
Surfscan AIT 8010 Particle Defect
KLA Surfscan AIT 8010 Particle Defect is a metrology and inspection system. KLA Surfscan AIT 8010 Particle Defect supports 200mm wafers. KLA Surfscan AIT 8010 Particle Defect is specified with software version 3.3.2.813.[1][2][3]
What it is
How it works
Where it fits in the process flow
General reference — not yet source-verifiedParticle defect inspection tools are typically placed at monitoring points between deposition, lithography, etch, clean, and polish operations. Particle defect inspection tools are used to verify that a process step has not introduced added contamination before wafers move to subsequent steps.
Applications
General reference — not yet source-verifiedParticle defect inspection systems are used for wafer surface monitoring in semiconductor manufacturing. Particle defect inspection systems are applied to contamination control, process qualification, line monitoring, and troubleshooting of defect excursions.
What do the numbers mean?
Power & electrical4
- Hz 50-60[3]
Wafer handling1
Control & software1
Configuration & options6
- Full Load Cap. 2A[3]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Surfscan AIT 8010 Particle Defect are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan AIT 8010 Particle Defect are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Surfscan AIT 8010 Particle Defect are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Surfscan AIT 8010 Particle Defect are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Surfscan AIT 8010 Particle Defect are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Surfscan AIT 8010 Particle Defect is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]KLA P-15 vs KLA Surfscan AIT 8010 Particle Defect comparison | Waferpedia — waferpedia.comwaferpedia.com
- [3]Inventory photo
- [4]KLA Surfscan AIT 8010 Particle Defect vs KLA Surfscan SP 1 TBI comparison | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 19, 2026.
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