Waferpedia

Comparison ledger

2367 Brightfield versus FLX 2320 A

KLA 2367 Brightfield and KLA FLX 2320 A, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyKLA 2367KLA FLX 2320
Specifications
Power Requirements208 V, 16 A, 50 / 60 Hz, 3 Phase[1]
CE MarkedYes[1]
ConfigurationORS Upgrade[1]Thin film stress measurement system[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing