Waferpedia

KLA

2367 Brightfield

Metrology & InspectionKLA 2367 family
Research Quality: 40% complete
2367 Brightfield — Inventory photo
Fig. 012367 BrightfieldInventory photo[1]

What it is

The KLA 2367 Brightfield Inspection is an inspection system from KLA.[1]

What do the numbers mean?

Power & electrical1

Power Requirements
208 V, 16 A, 50 / 60 Hz, 3 Phase[1]
Accurate?

Wafer handling1

25 cassette HW 200 mm[1]
Accurate?

Configuration & options4

CE Marked
Yes[1]
Accurate?
ORS Upgrade[1]
Accurate?
GEM/SECS and HSMS Model[1]
Accurate?
Enable .12 , .62, .39 Picels[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Power Requirements208 V, 16 A, 50 / 60 Hz, 3 Phase[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the KLA 2367 Brightfield?

It is a brightfield inspection system from KLA.[1]

Is a power specification stated?

Yes. The listed power requirements are 208 V, 16 A, 50 / 60 Hz, 3 phase.[1]

Not publicly documented

The following facts about the 2367 Brightfield are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2367 Brightfield are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 2367 Brightfield are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 2367 Brightfield are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 2367 Brightfield are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 2367 Brightfield is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Jul 24, 2026.

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