Waferpedia

Comparison ledger

2367 Brightfield versus HRP 340 Thickness Measurement

KLA 2367 Brightfield and KLA HRP 340 Thickness Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyKLA 2367KLA HRP 340
Specifications
Power Requirements208 V, 16 A, 50 / 60 Hz, 3 Phase[1]
CE MarkedYes[1]
ConfigurationORS Upgrade[1]50/60 Hz[2]
Phase1 Phase / 3 Wires[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing