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Comparison ledger

2367 Brightfield versus INS 3000 DUV Defect

KLA 2367 Brightfield and KLA INS 3000 DUV Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
2367 BrightfieldKLA
INS 3000 DUV DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—Wafer transport check
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 2367KLA INS 3000
Specifications
Power Requirements208 V, 16 A, 50 / 60 Hz, 3 Phase[1]—
CE MarkedYes[1]—
ConfigurationORS Upgrade[1]Auto Focus check for each lens[2]
Wafer size—Wafer transport check[2]
Stage—Slight left-to-right tilt observed; minor scratches present[2]
2367 Brightfield entryINS 3000 DUV Defect entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing