Comparison ledger
KLA 2367 and KLA 5100 XP Overlay Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 2367KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | Only one wafer size at a time | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 2367 | KLA 5100 |
| Specifications | ||
| SW Version | 10.4.507[1] | — |
| Wafer size | Only one wafer size at a time[1] | — |
| 300 mm (12") | Yaskawa + Asyst ISO Port or[1] | — |
| Configuration | Shinko LP[1] | — |
| 200 mm (8") | Yaskawa + Asyst Versa Port (SMIF)[1] | — |
| GL | G Line[1] | — |
| IL | I Line[1] | — |
| VIS | Visible[1] | — |
| Software Version | — | 14.70.01[2] |
| Robot Type | — | KLA Internal[2] |
| Handler | — | x3 Open Cassette[2] |
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