Comparison ledger
KLA 2367 and KLA AIT XUV Darkfield, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 2367KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | Only one wafer size at a time | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 2367 | KLA AIT XUV |
| Specifications | ||
| SW Version | 10.4.507[1] | — |
| Wafer size | Only one wafer size at a time[1] | — |
| 300 mm (12") | Yaskawa + Asyst ISO Port or[1] | — |
| Configuration | Shinko LP[1] | Pillar[2] |
| 200 mm (8") | Yaskawa + Asyst Versa Port (SMIF)[1] | — |
| GL | G Line[1] | — |
| IL | I Line[1] | — |
| VIS | Visible[1] | — |
| Software Version | — | 6.3.24.3[2] |
| CIM | — | SECS / GEM[2] |
| Factory System | — | FOUPS[2] |
| Handler System | — | Robot[2] |
| Missing Parts | — | Incomplete Wafer Handler Module & Inspection Module[2] |
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