Waferpedia

Comparison ledger

.496 PSL WaferversusQuadra 3

KLA .496 PSL Wafer, Nordson Quadra 3, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
Quadra 3Nordson
OEMKLANordson
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .496 PSL WaferNordson Quadra 3
Cited variants—
  • Quadra 3 Pro[1]
Specifications
ConfigurationNIST Traceable[2]3 Wire PNE[4]
Wafer size8 inch[2]—
TraceabilityNIST Traceable[2]—
Compatible systemsCapable on Surfscan 6xy0 and SP1[2]—
CategoryMetrology & Inspection[3]Metrology & Inspection[4]
Phase—1 Phase[4]
Model—Quadra 3[5]
OEM—Nordson / Dage[5]
Power—200 - 230v[4]
Frequency—50/60 hz[4]
X-ray tube—QuadraNT Sealed Transmission Tube (0.95 µm feature resolution, 30–160 kV, 10 W max)[6]
Detector—Aspire FP Flat Panel (1.4 MP, 75 µm pixel pitch, 10 fps, 16-bit digitization)[6]
Geometric magnification—Up to 2000×[6]
Total magnification—Up to 7500×[6]
Sample stage—Dual-axis tilt geometry (±70° tilt per axis, no sample rotation required)[6]
Inspection area—510 × 445 mm[6]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]quiptech.comquiptech.com
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]waferpedia.comwaferpedia.com
  5. [5]inventory listing
  6. [6]instrumenthive.cominstrumenthive.com