Comparison ledger
KLA .496 PSL Wafer, Rigaku CT Lab HX 130, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | CT Lab HX 130Rigaku | |
|---|---|---|
| OEM | KLA | Rigaku |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | Rigaku CT Lab HX 130 |
| Specifications | ||
| Configuration | NIST Traceable[1] | X-ray Generating Unit:[3] |
| Wafer size | 8 inch[1] | — |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | — |
| X-ray Generating Method | — | Fixed Anode[3] |
| X-ray Focal Size | — | Mini 5 μm[3] |
| Fixed Filter | — | Al 1.0 mm, Cu 0.1 mm, & Cu 0.2 mm[3] |
| Detector Type | — | Semiconductor Flat Panel Detector[3] |
| Detector Area | — | 11.4 mm x 145.7 mm[3] |
| Pixel Size | — | 49.5 μm x 49.5 μm[3] |
| Pixel Volume | — | 2352 pixel x 2944 pixel[3] |
| Output Image Bit | — | 14 bit[3] |
| Z Axis | — | Up / Down direction[3] |
| Movable Range | — | 140 mm[3] |
| Moveable Range | — | X axis and Y axis: ± 3 mm[3] |
| Sample Mountable Field of View | — | Max.φ200 mm x 270 mm[3] |
| Sample Stick Size | — | φ5 mm[3] |
| Sample Board Size | — | φ130 mm or φ200 mm (Sample load: 5 kg)[3] |
| Tool type | — | Benchtop micro CT scanner[4] |
| Tube | — | Sealed[3] |
| Cooling | — | Air cooling[3] |
| Z axis travel | — | Up/down direction, movable range 140 mm[3] |
| XY axes option | — | Optional; moveable range X axis and Y axis: ± 3 mm[3] |
| Sample board size | — | φ130 mm or φ200 mm[3] |
| Sample load | — | 5 kg[3] |
| X-ray source | — | 130 kV, 39 W high-power X-ray source[5] |
| Adjustable geometry | — | Adjustable SOD and SDD[5] |
| High-resolution voxel resolution | — | 2.1-micron voxel resolution[5] |
| Large FOV | — | 200 mm[5] |
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