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Rigaku

CT Lab HX 130

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Rigaku CT Lab HX 130 is a benchtop micro CT scanner. Rigaku CT Lab HX 130 includes an X-ray generating unit, a semiconductor flat panel detector, and a motorized sample stage. Rigaku CT Lab HX 130 is equipped with a 130 kV, 39 W high-power X-ray source.[1][2]

CT Lab HX 130 — Inventory photo
Fig. 01CT Lab HX 130Inventory photo[3]

What it is

The X-ray generating unit uses a sealed tube with a fixed anode and air cooling, providing a focal spot size of 5 μm. The system includes fixed filters of aluminium 1.0 mm and copper 0.1 mm and 0.2 mm. The detector is a semiconductor flat panel with an imaging area of 11.4 mm by 145.7 mm, a pixel size of 49.5 μm, and an array of 2352 by 2944 pixels, producing 14-bit images. The sample stage offers 140 mm of Z-axis travel, optional XY stages with ±3 mm range, and accepts sample boards of 130 mm or 200 mm diameter; the maximum field of view is 200 mm in diameter and 270 mm in height, with a sample load capacity of 5 kg. The X-ray source operates at 130 kV and 39 W.[3][1]

How it works

The CT Lab HX 130 provides adjustable source-to-object distance (SOD) and source-to-detector distance (SDD), enabling users to select between a high-resolution mode with a voxel size of 2.1 μm and a large-field-of-view mode covering 200 mm. The X-ray source voltage and current settings, as well as the beam filter, can be adjusted to optimize contrast and penetration for different sample materials and thicknesses.[1]

Applications

The CT Lab HX 130 is used in electronics to scan full circuit boards as well as individual components. In geology, it enables high-resolution imaging of rock interiors for mineralogical studies. For metallic parts, it provides both low-resolution full-part rendering for quality control and high-resolution scans to reveal voids and cracks in materials such as aluminium. In life science, it offers high-contrast imaging of plants, insects, and animal tissues.[1]

What do the numbers mean?

Optics & imaging3

Detector Type
Semiconductor Flat Panel Detector[3]
Accurate?
Detector Area
11.4 mm x 145.7 mm[3]
Accurate?
High-resolution voxel resolution
2.1-micron voxel resolution[1]
Accurate?

Control & software1

Operation by controller software in control panel screen (Electronic Control)[3]
Accurate?

Dimensions & facilities2

Sample Board Size
φ130 mm or φ200 mm (Sample load: 5 kg)[3]
Accurate?
Sample load
5 kg[3]
Accurate?

Configuration & options27

X-ray Generating Unit:[3]
Accurate?
XY Motorized Stage[3]
Accurate?
X-ray Generating Method
Fixed Anode[3]
Accurate?
Tube Sealed[3]
Accurate?
Air Cooling[3]
Accurate?
X-ray Focal Size
Mini 5 μm[3]
Accurate?
Fixed Filter
Al 1.0 mm, Cu 0.1 mm, & Cu 0.2 mm[3]
Accurate?
X-ray Detecting Unit:[3]
Accurate?
Pixel Size
49.5 μm x 49.5 μm[3]
Accurate?
Pixel Volume
2352 pixel x 2944 pixel[3]
Accurate?
Output Image Bit
14 bit[3]
Accurate?
Sample Stage:[3]
Accurate?
Z Axis
Up / Down direction[3]
Accurate?
Movable Range
140 mm[3]
Accurate?
XY Axes (Optional)[3]
Accurate?
Moveable Range
X axis and Y axis: ± 3 mm[3]
Accurate?
Sample Mountable Field of View
Max.φ200 mm x 270 mm[3]
Accurate?
Sample Stick Size
φ5 mm[3]
Accurate?
Tool type
Benchtop micro CT scanner[4]
Accurate?
Tube
Sealed[3]
Accurate?
Cooling
Air cooling[3]
Accurate?
Z axis travel
Up/down direction, movable range 140 mm[3]
Accurate?
XY axes option
Optional; moveable range X axis and Y axis: ± 3 mm[3]
Accurate?
Sample board size
φ130 mm or φ200 mm[3]
Accurate?
X-ray source
130 kV, 39 W high-power X-ray source[1]
Accurate?
Adjustable geometry
Adjustable SOD and SDD[1]
Accurate?
Large FOV
200 mm[1]
Accurate?
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Frequently asked questions

What kind of equipment is the Rigaku CT Lab HX 130?

The Rigaku CT Lab HX 130 is a benchtop micro CT scanner.[4][2]

What detector does the Rigaku CT Lab HX 130 use?

The Rigaku CT Lab HX 130 uses a semiconductor flat panel detector.[3][2]

Not publicly documented

The following facts about the CT Lab HX 130 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the CT Lab HX 130 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the CT Lab HX 130 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the CT Lab HX 130 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the CT Lab HX 130 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the CT Lab HX 130 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]cairnhill.com — cairnhill.comcairnhill.com
  2. [2]Rigaku CT Lab HX 130 family | Waferpedia — waferpedia.comwaferpedia.com
  3. [3]Inventory photo
  4. [4]science.rsu.lv — science.rsu.lvscience.rsu.lv
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Last updated Oct 21, 2026.

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